Speaker
Description
We present our progress towards the development of 3D-integrated sensing technology using advanced manufacturing techniques and collaboration with industry leaders. The aim of the project is to develop technology to enable large-scale particle detectors with 3D-integrated designs to simultaneously achieve 10 μm position resolution and 10 ps precision timing, with low-power consumption and high throughput rates. Our developments on the design and manufacturing of Low-Gain Avalanche Diodes (LGADs) devices in 12’’ foundry processes will be discussed, as well as the design of the ASIC techniques to meet various application needs for granularity, precision timing, and power.
This research program leverages the unique combination of facilities and cross-disciplinary expertise of scientists and engineers at SLAC, FNAL, and LLNL and industrial partners. We show the current status of the project and future plans.
