Speaker
Peter Kim
(Vanderbilt)
Description
The CROC chips and sensor for the CMS Forward Pixel Detector (TFPX) of the HL-LHC require a conformal coating (Parylene-N) to prevent sparking between the sensor and the readout chip. We show the steps we took to achieve successful coating in an industrial setting without the in-house experience to deal with delicate features like wirebonds or the ability for mask the bottom of the chip from coating. We chose not to coat the bottom of the chips to increase cooling performance.
Primary author
Peter Kim
(Vanderbilt)